Electronic-grade chlorine trifluoride is an important special gas required for semiconductor cleaning and etching. It has huge market development potential.

Chlorine trifluoride is an inorganic compound with the chemical formula ClF3. It appears as a colorless gas at room temperature, is corrosive, and is easy to liquefy. Liquid chlorine trifluoride appears as a light yellow-green liquid and is highly toxic. According to different uses and performance indicators, chlorine trifluoride can be divided into electronic grade chlorine trifluoride, industrial grade chlorine trifluoride, etc.

Among them, industrial-grade chlorine trifluoride is mainly used as an oxidant in the production of chemical products such as fluorinating agents, combustion agents, and propellants. Its end-use applications include plastics, chemicals, metallurgy, machinery, military industry, environmental protection, energy, etc.; electronic-grade chlorine trifluoride Chlorine is mainly used in the silicon wafer and cavity cleaning and etching processes of the semiconductor manufacturing process. It is a high-performance special gas commonly used in the electronics industry.

Electronic grade chlorine trifluoride is the most promising subcategory in the chlorine trifluoride market. Currently, the mainstream electronic special gas required for cleaning and etching in the semiconductor manufacturing process is nitrogen trifluoride (NF3). In 2022, its share of the global electronic special gas market will exceed 20%. Compared with nitrogen trifluoride, electronic grade chlorine trifluoride does not need to be plasma excited before use and can react with semiconductor materials at room temperature, so it can be widely used in cold wall CVD chamber cleaning scenarios; at the same time, it can be used Cleaning with chlorine trifluoride is also a chemical etching process, and its etching removal rate can reach more than 10 μm/min.

According to the “2023-2028 Electronic Grade Chlorine Trifluoride Industry Market In-depth Research and Investment Prospects Forecast Analysis Report” released by the Industrial Research CenterIt shows that electronic-grade chlorine trifluoride, as a high-performance electronic specialty gas product, has been widely used in the global semiconductor manufacturing field, and is mostly used in the cleaning and etching of chips under the 14nm process. The global electronic-grade chlorine trifluoride market size will be approximately US$120 million in 2022, accounting for less than 3% of the global electronic special gas market.

Electronic grade chlorine trifluoride has broad market development potential in the future. On the one hand, electronic-grade chlorine trifluoride is mostly used in chip manufacturing processes below the 14nm process in the semiconductor field. As a major semiconductor producer in the world, our country’s chip manufacturing technology is constantly improving and 14nm process chips have achieved mass production. However, chips below the 14nm process are still in the research and development stage and have not yet achieved large-scale mass production. Therefore, chlorine trifluoride has huge development potential in my country’s semiconductor field, and future market demand is expected to achieve substantial growth after the mass production of chips below the 14nm process.

Industry analysts said that on the other hand, electronic grade chlorine trifluoride technology is more difficult and currently There are only a few companies in the world with large-scale mass production capabilities of this product, such as Japan’s Kanto Denka and Japan’s Asahi Glass, and the overall output is still relatively low. However, after continuous research and development, my country’s Fujian Del Technology has the industrial mass production capacity of electronic-grade chlorine trifluoride, successfully breaking the market monopoly and becoming the third company in the world after Japan and the United States to achieve the industrialization of electronic-grade chlorine trifluoride. s country. In the future, as domestic chlorine trifluoride production continues to increase, it is expected to meet the subsequent increasing demand for chlorine trifluoride in the domestic market.