Carbonyl fluoride is one of the electronic gases. my country has not yet achieved large-scale mass production.

Carbonyl fluoride, whose molecular formula is CF2O, is also known as fluorophosgene, carbonyl fluoride, and carbonyl fluoride. It appears as a colorless gas at room temperature and pressure. It can be liquefied under pressure and is easy to store. It is irritating, toxic, and has strong corrosive. Carbonyl fluoride is soluble in ethanol and water. It can be hydrolyzed when exposed to water to emit highly toxic hydrogen fluoride and carbon dioxide gases. It is non-flammable and can decompose when exposed to high temperatures. The decomposition products are carbon tetrafluoride and carbon dioxide. It is explosive in a closed container. Danger.

There are many methods for preparing carbonyl fluoride, mainly including: carbon monoxide electrolytic fluorination method, carbon monoxide fluorine gas fluorination method, carbon dioxide fluorine gas fluorination method, phosgene fluorination method, difluorochloromethane (R22)/trifluoromethane ( R23) Photooxidation method, reaction method of perfluoroalkyl iodide and oxygen, tetrafluoroethylene (TFE) oxygen oxidation method, etc. Among them, the carbon monoxide fluorination method has mild reaction conditions, can be produced continuously, has a high conversion rate, and has many applications; the tetrafluoroethylene method has a high conversion rate, good selectivity, and is suitable for industrialization, but the raw material cost is higher than the former.

According to the “Carbonyl Fluoride Industry In-depth Market Research and Investment Strategy Suggestions Report 2021-2025” released by the Industrial Research Center, carbon dioxide The application fields of acyl fluoride include organic synthesis raw materials, organic synthesis intermediates, organic synthesis fluorination agents, and organic synthesis purification and drying. High-purity carbonyl fluoride can be used in the semiconductor industry as wafer etchant and semiconductor equipment cleaning agent. Carbonyl fluoride has zero ODP (ozone depletion potential) and low GWP (global warming potential). It is an environmentally friendly gas. In the context of the continuous expansion of the scale of the global semiconductor industry, its demand continues to grow and is the main One of the electronic gas products.

Globally, Japan was the first country to apply carbonyl fluoride in the semiconductor industry and the first country to produce electronic-grade high-purity carbonyl fluoride on a large scale. At this stage, Japan’s carbonyl fluoride manufacturers mainly include Kanto Chemical, Showa Denko, etc. In order to meet the needs of the semiconductor industry, my country’s research on carbonyl fluoride continues to deepen. Relevant research institutions and enterprises mainly include the Nuclear Industry Physical and Chemical Engineering Research Institute, China Shipbuilding Industry Corporation 718 Institute, Jinhong Gas, Sinochem Modern Environmental Protection Chemicals, etc.

But at present, my country has not yet achieved large-scale industrial production of carbonyl fluoride. China Shipbuilding Industry Corporation 718 is in the small trial production stage. Companies under the Nuclear Industry Physical and Chemical Engineering Research Institute have products for sale, but the production scale and product quality are uncertain. Overall, compared with Japan, my country’s carbonyl fluoride industry is developing slowly, with a small number of enterprises, and there is still much room for improvement in the future.

Industry analysts said that there are many types of electronic gas products. Except for a few products that use large amounts, most single products use small amounts. However, More products have higher irreplaceability. In the early days, my country’s electronic gas market relied heavily on foreign countries. As the scale of my country’s semiconductor industry continued to expand and production technology continued to advance, the pace of domestic substitution of electronic gas in my country accelerated, and the localization rate of many market segments continued to increase. From this point of view, my country will gradually achieve independent production of carbonyl fluoride in the future, and the size of downstream market demand is the main factor driving the speed of independent production of carbonyl fluoride.